EUV Technical Support Engineer (Power Performance) - Taichung

Introduction to the job

The EUV Power Technical Support Engineer is responsible for supporting and maintaining EUV source power performance, stability, and availability for EUV lithography systems in semiconductor manufacturing environments. The role provides advanced technical expertise to diagnose, analyze, and resolve EUV source power‑related issues to ensure system performance meets operational and manufacturing requirements.

This position works closely with customers, field service teams, and internal engineering organizations to investigate performance deviations, perform root cause analysis, and implement corrective and preventive actions. The role contributes to system uptime, productivity, and long‑term reliability through proactive monitoring, data analysis, and continuous improvement activities.

The EUV Power Technical Support Engineer operates in a technically complex, customer‑facing environment and plays a key role in maintaining stable EUV operations and supporting high‑volume manufacturing objectives.

Role and responsibilities

The EUV Power Technical Support Engineer ensures optimal EUV performance, availability, and reliability in high‑volume semiconductor manufacturing environments. The role applies deep technical expertise to troubleshoot complex issues, optimize system performance, and act as a trusted technical partner to customers and internal stakeholders.

• Monitor, analyze, and optimize EUV source power, stability, and availability to meet customer manufacturing requirements.

• Diagnose performance degradations related to EUV source subsystems (laser, droplets, collector, vacuum, and diagnostics).

• Perform advanced root cause analysis for EUV performance issues using system logs, sensor data, and trend analysis.

• Lead technical investigations on recurring or high-impact performance issues and define corrective actions.

• Provide on-site and remote technical support to resolve complex performance problems efficiently.

• Act as a trusted technical advisor to customers on EUV source performance, limitations, and best operating practices.

• Communicate technical findings, status updates, and improvement plans clearly to customer engineering and management teams.

• Develop and implement preventive maintenance recommendations and performance optimization strategies.

• Identify performance gaps and propose process improvements to enhance uptime and yield.

• Document technical cases, lessons learned, and best practices to enhance organizational knowledge.

• Contribute to technical guidelines, troubleshooting procedures, and training materials for field teams.

• Support cross-site knowledge sharing to improve global EUV support capability.

Education and experience

• Bachelor's degree or equivalent experience. 

• 1-2+ years, technical knowledge of EUV Source & Drive Laser preferred. 

• Familiarity with EUV Dose Control, Source & CO2 performance preferred.

Skills

• EUV Source & Power Systems Knowledge
  Understanding of EUV source architecture, power generation, stability drivers, and degradation mechanisms.

• Advanced Troubleshooting
  Ability to diagnose complex EUV source power and performance issues using structured problem‑solving methods.

• Root Cause Analysis (RCA)
  Experience leading technical investigations and defining corrective and preventive actions.

• Semiconductor Manufacturing Environment
  Familiarity with fab operations, high‑volume manufacturing constraints, and uptime requirements.

• Data Analysis & Interpretation
  Ability to analyze system logs, sensor data, performance trends, and reliability metrics.

• System Performance Optimization
  Skills in identifying performance gaps and implementing optimization or preventive improvements.

• Technical Documentation
  Ability to document findings, procedures, and best practices clearly and accurately.

Other information

• Working model is 8 hours shift model, including day shift and night shift